Semiconductor Equipment Support Solutions
Engineered pedestal solutions designed around the structural, stability, load, and vibration requirements of semiconductor equipment.
High-performance equipment pedestals engineered for semiconductor manufacturing tools, with configurations designed to meet demanding load-bearing, structural rigidity, stability, and vibration requirements.
Explore Our Pedestal Solutions
Type A
Steel Load-Distribution Plate
Stable support for concentrated equipment loads.
High-strength steel load-distribution plates designed to distribute concentrated tool loads, reduce localized loading, and provide stable equipment support.
Materials
Powder-coated Q235B carbon steel
Brushed SUS304 stainless steel
Type B
Steel Structure Pedestal
High-rigidity support for vibration-sensitive applications.
High-rigidity structural steel pedestals providing robust equipment support, efficient load transfer, and enhanced vibration performance. Configurations are engineered for vibration-sensitive semiconductor applications, with solutions designed to meet requirements up to VC-B.
Type C
Reinforced Concrete Pedestal
High-mass stability for demanding vibration environments.
High-mass, high-rigidity reinforced concrete pedestals designed for highly vibration-sensitive semiconductor equipment. Increased structural mass and stiffness provide enhanced vibration stability and displacement control, with configurations designed to meet demanding requirements up to VC-D.
OSM Pedestal
Integrated Infrastructure. Built Off-Site.
An industrialized, integrated pedestal solution combining the equipment pedestal with customized prefabricated utility modules, including gas, vacuum, water, and other tool utility systems, tailored to client and project requirements.
OFF-SITE INTEGRATION
Customized utility modules are integrated before delivery.
REDUCED FIELD WORK
Customized utility modules are integrated before delivery.
FASTER TOOL HOOKUP
Streamlined installation helps accelerate the equipment hookup schedule.
Have a Specific Equipment Requirement?
Our engineering team can help determine the appropriate pedestal or integrated solution for your application.